Thin-Film Piezo MEMS Piezo-Related Terminology
Piezo-Related Terminology
This page provides a brief explanation on piezo-related terminology.
Terminology | Definition |
---|---|
Piezo | Piezoelectric element/device |
Piezoelectric Effect | A phenomenon in which voltage is generated by applying a force (pressure) |
Reverse Piezoelectric Effect | A phenomenon in which deformation appears by applying a voltage |
Piezoelectric Element | Products and devices that utilize piezoelectric and reverse piezoelectric effects |
Sensor | Devices that convert phenomena and information into electrical signals by applying scientific principles |
Actuator | Drive devices that convert electrical energy in order to mechanically move equipment |
Ion | An atom charged with an excess or deficit of electrons |
Piezoelectric Materials | Any crystalline material exhibiting piezoelectric properties |
Piezoelectric Single Crystals | A piezoelectric material featuring a continuous and uniform internal crystalline structure |
Piezoelectric Ceramics | A piezoelectric material with a grain or domain wall structure |
Grain Structure | An interface that exists between 2 or more small crystals in a polycrystal |
Domain Wall Structure | A structure in which boundaries exist in different polarizations within the crystal |
Polarization | A phenomenon whereby a positive or negative charge appears or magnetic pole is generated when placed in a magnetic or electrical field |
PZT | Lead zirconate titanate (PbZrxTi1-xO3) (O<x<1) |
Sputtering | A film formation method in which atoms on the surface of a metal are ejected by bombarding it with high energy particles |
CSD | A method of forming thin films by first coating then baking a solution of metallic organic acid salts and compounds |
Sol-Gel Method | A type of CSD. A method for achieving a thin film by heating then baking a liquid in the sol state |
Sol State | A colloid with liquid as a dispersion medium (i.e. soapy water, glue, eggs, milk, mayonnaise) |
Gel State | The state where the liquidity of the sol state is lost |
MOCVD | An metal-organic chemical vapor deposition method for growing crystals using organic metal or gas as the raw material |
Footprint | The occupied area, here referring to the area where the device is placed |
Piezoelectric | A dielectric that produces polarization (voltage) when stress is applied |
Pyroelectric | A piezoelectric material that spontaneously polarizes without the application of an external electric field |
Ferroelectric | A type of pyroelectric material in which the direction of polarization can be reversed by applying an external electric field |
Thin-Film Piezo | A piezo device featuring a piezoelectric material thickness of several μm |
Bulk Piezo | A piezo device featuring a piezoelectric material thickness in the tens of μm |
The ROHM Group offers a Thin-Film Piezo MEMS Foundry Service that allows customers to achieve their designs and innovations.
> Thin-Film Piezo MEMS Foundry (Services)
The next page provides a brief explanation on MEMS and relevant key technologies.