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Thin-Film Piezo MEMS Piezo-Related Terminology

Piezo-Related Terminology

This page provides a brief explanation on piezo-related terminology.

Terminology Definition
Piezo Piezoelectric element/device
Piezoelectric Effect A phenomenon in which voltage is generated by applying a force (pressure)
Reverse Piezoelectric Effect A phenomenon in which deformation appears by applying a voltage
Piezoelectric Element Products and devices that utilize piezoelectric and reverse piezoelectric effects
Sensor Devices that convert phenomena and information into electrical signals by applying scientific principles
Actuator Drive devices that convert electrical energy in order to mechanically move equipment
Ion An atom charged with an excess or deficit of electrons
Piezoelectric Materials Any crystalline material exhibiting piezoelectric properties
Piezoelectric Single Crystals A piezoelectric material featuring a continuous and uniform internal crystalline structure
Piezoelectric Ceramics A piezoelectric material with a grain or domain wall structure
Grain Structure An interface that exists between 2 or more small crystals in a polycrystal
Domain Wall Structure A structure in which boundaries exist in different polarizations within the crystal
Polarization A phenomenon whereby a positive or negative charge appears or magnetic pole is generated when placed in a magnetic or electrical field
PZT Lead zirconate titanate (PbZrxTi1-xO3) (O<x<1)
Sputtering A film formation method in which atoms on the surface of a metal are ejected by bombarding it with high energy particles
CSD A method of forming thin films by first coating then baking a solution of metallic organic acid salts and compounds
Sol-Gel Method A type of CSD. A method for achieving a thin film by heating then baking a liquid in the sol state
Sol State A colloid with liquid as a dispersion medium (i.e. soapy water, glue, eggs, milk, mayonnaise)
Gel State The state where the liquidity of the sol state is lost
MOCVD An metal-organic chemical vapor deposition method for growing crystals using organic metal or gas as the raw material
Footprint The occupied area, here referring to the area where the device is placed
Piezoelectric A dielectric that produces polarization (voltage) when stress is applied
Pyroelectric A piezoelectric material that spontaneously polarizes without the application of an external electric field
Ferroelectric A type of pyroelectric material in which the direction of polarization can be reversed by applying an external electric field
Thin-Film Piezo A piezo device featuring a piezoelectric material thickness of several μm
Bulk Piezo A piezo device featuring a piezoelectric material thickness in the tens of μm

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The next page provides a brief explanation on MEMS and relevant key technologies.